1～2 item / All 2 items
We can design and manufacture cleaning solutions for all types of jigs, including cassettes and quartz jigs, upon consultation. Stainless steel options are also available.
We can also design and manufacture cleaning fixtures for large equipment. In the case of cassette cleaning, we can provide precision cleaning with integrated brushes. *For more details, please download the PDF (catalog) or feel free to contact us.*
Vertical cleaning system (VTC series) saves space and contributes to the "reduction of chemical solution and pure water". World's top-class delivery record (over 400 units)
The "HTC/VTC" series is a quartz tube cleaning system for cleaning quartz tubes used in the diffusion, CVD, and annealing processes. 【Features】 ■The lineup of systems to match the shape of quartz tubes and cleaning applications ・Compatible with quartz tubes for 6-inch, 8-inch, and 12-inch processes. ・Horizontal type (HTC) and vertical type (VTC) can be selected according to the shape of the quartz tubes and cleaning applications. ■Saves space and contributes to the "reduction of chemical solution and pure water" ・Vertical type (VTC series) saves space and contributes to the "reduction of chemical solution and pure water" ■Customizable ■World top-class delivery record (over 400 units) ・World top-class delivery record (over 400 units) to domestic and overseas semiconductor device manufacturers and silicon wafer manufacturers. ■Extensive experience in handling related systems ・We are handling related systems such as quartz boat cleaning systems, quartz parts cleaning systems, quartz tube storage units, quartz transfer carts, and so on. *For more details, please contact us or download the catalog for viewing.
